Sputter Depth Profiling of Mo/B4C/Si and Mo/Si Multilayer Nanostructures:a Round-Robin Characterization by Different Techniques

AuthID
 P-00G-N86
10
Author(s)
Ber, B
·
Babor, P
·
Brunkov, PN
·
Chapon, P
·
Drozdov, MN
·
Duda, R
·
Kazantsev, D
·
Polkovnikov, VN
·
Yunin, P
·
Document Type
Article
Year published
2013
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 540, Pages: 96-105
Indexing
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84901842818
Source Identifiers
ISSN: 0040-6090
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