in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume: 1, Pages: 49-52
Conference
12Th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2003 - Digest of Technical Papers, Date: 8 June 2003 through 12 June 2003, Sponsors: IEEE Electron Devices Society (EDS)