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Dynamic Wet Etching of Silicon Through Isopropanol Alcohol Evaporation
AuthID
P-00G-VNV
5
Author(s)
Monteiro, TS
·
Kastytis, P
·
Goncalves, LM
·
Minas, G
·
Cardoso, S
Document Type
Article
Year published
2015
Published
in
MICROMACHINES,
ISSN: 2072-666X
Volume: 6, Issue: 10, Pages: 1534-1545 (12)
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Publication Identifiers
DOI
:
10.3390/mi6101437
Handle
:
https://hdl.handle.net/1822/40574
SCOPUS
: 2-s2.0-84946399283
Wos
: WOS:000364240500012
Source Identifiers
ISSN
: 2072-666X
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