Structure and Morphology of Titanium Nitride Films Deposited by Laser-Induced Chemical Vapour Deposition

AuthID
 P-00H-2CH
4
Author(s)
Jeandin, M
Document Type
Article
Year published
1994
Published
in J Mater Sci - Journal of Materials Science, ISSN: 0022-2461
Volume: 29, Issue: 2, Pages: 404-411
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ISSN: 0022-2461
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