Hydrogenated Thin Film Silicon Semiconductors Produced by a Two Consecutive Decomposition and Deposition Chamber System

AuthID
 P-00H-65S
7
Author(s)
Guimarães, L
·
Santos, M
·
Maçarico, A
·
Carvalho, N
·
Document Type
Article
Year published
1989
Published
in Vacuum, ISSN: 0042-207X
Volume: 39, Issue: 7-8, Pages: 789-790
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ISSN: 0042-207X
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