Influence of the Target/Shield Distance on the Coatings Deposition by Rf Magnetron Sputtering

AuthID
 P-00H-660
3
Author(s)
Vieira, M
Document Type
Article
Year published
1994
Published
in Vacuum, ISSN: 0042-207X
Volume: 45, Issue: 10-11, Pages: 1099-1100
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ISSN: 0042-207X
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