Engineering of the Energy Coupling in Pecvd Systems Used to Produce Large Area A-Si:h Coatings

AuthID
 P-00H-661
2
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Document Type
Article
Year published
1994
Published
in Vacuum, ISSN: 0042-207X
Volume: 45, Issue: 10-11, Pages: 1107-1108
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ISSN: 0042-207X
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