The Influence of Oxygen Partial Pressure on the Properties of Dc Reactive Magnetron Sputtered Titanium Oxide Films

AuthID
 P-00H-6GB
2
Author(s)
dos Santos, M
Document Type
Article
Year published
1993
Published
in Applied Surface Science, ISSN: 0169-4332
Volume: 68, Issue: 3, Pages: 319-325
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ISSN: 0169-4332
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