The Effect of Substrate Temperature on the Properties of Sputtered Titanium Oxide Films

AuthID
 P-00H-6GD
3
Author(s)
dos Santos, M
Document Type
Article
Year published
1993
Published
in Applied Surface Science, ISSN: 0169-4332
Volume: 65-66, Pages: 235-239
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ISSN: 0169-4332
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