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Incorporation of N in Tio2 Films Grown by Dc-Reactive Magnetron Sputtering
AuthID
P-00H-CJV
6
Author(s)
Sério, S
·
Melo Jorge, M
·
Nunes, Y
·
Barradas, N
·
Alves, E
·
Munnik, F
Document Type
Article
Year published
2012
Published
in
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms,
ISSN: 0168-583X
Volume: 273, Pages: 109-112
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12
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Publication Identifiers
DOI
:
10.1016/j.nimb.2011.07.052
Source Identifiers
ISSN
: 0168-583X
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