Deposition of Silicon Nitride Thin Films by Hot-Wire Cvd at 100 °C and 250 °C

AuthID
 P-00H-EGJ
6
Author(s)
Gonçalves, L
·
Marins, E
·
Viseu, T
·
Document Type
Article
Year published
2009
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 517, Issue: 12, Pages: 3503-3506
Indexing
Crossref®
Google Scholar®
Publication Identifiers
Source Identifiers
ISSN: 0040-6090
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

footer slogan

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service