Polymorphous Silicon Deposited in Large Area Reactor at 13 and 27 Mhz

AuthID
P-00H-FB0
6
Author(s)
Roca i Cabarrocas, P
·
Lebib, S
·
Silva, V
·
Document Type
Article
Year published
2003
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 427, Issue: 1-2, Pages: 6-10
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ISSN: 0040-6090
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