Fast and Cheap Method to Qualitatively Measure the Thickness and Uniformity of Zro2 Thin Films

AuthID
 P-00H-GHP
4
Author(s)
Marques, A
·
Document Type
Article
Year published
2001
Published
in Materials Science in Semiconductor Processing, ISSN: 1369-8001
Volume: 4, Issue: 1-3, Pages: 319-321
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ISSN: 1369-8001
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