Tuning the Surface Morphology in Self-Organized Ion Beam Nanopatterning of Si(001) via Metal Incorporation: from Holes to Dots

AuthID
P-00H-PMJ
6
Author(s)
Vázquez, L
·
Gago, R
·
Albella, JM
·
Czigány, Z
Document Type
Article
Year published
2008
Published
in Nanotechnology, ISSN: 0957-4484
Volume: 19, Issue: 35, Pages: 355306
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ISSN: 0957-4484
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