Current-Pressure Characteristics of Planar Magnetron Discharges in Rare Gases

AuthID
 P-00H-WX2
5
Author(s)
Escrivão, ML
·
Cabral, MH
·
Teixeira, MR
·
Maneira, MJP
Document Type
Article
Year published
2004
Published
in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films - J. Vac. Sci. Technol. A, ISSN: 0734-2101
Volume: 22, Issue: 6, Pages: 2361
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ISSN: 0734-2101
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