Residual Stress and Adhesion of Molybdenum Coatings Produced by Magnetron Sputtering

AuthID
 P-00J-CH8
2
Author(s)
Teixeira, V
Document Type
Article
Year published
1992
Published
in Vacuum, ISSN: 0042-207X
Volume: 43, Issue: 5-7, Pages: 455-458
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ISSN: 0042-207X
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