Simultaneous Formation of Silicon Carbide and Diamond on Si Substrates by Microwave Plasma Assisted Chemical Vapor Deposition

AuthID
 P-00J-J4N
7
Author(s)
Fernandes, A
·
Soares, M
·
Cabral, G
·
Neves, A
·
Grácio, J
Document Type
Article
Year published
2008
Published
in New Carbon Materials, ISSN: 1872-5805
Volume: 23, Issue: 3, Pages: 250-258
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ISSN: 1872-5805
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