Characterization of a Cmos Humidity Sensor Using Different Polyimides as Sensing Films

AuthID
 P-00J-RT0
4
Author(s)
Qiu, Y
·
Azeredo-Leme, C
·
Alcacer, L
·
4
Editor(s)
Bergmann, Neil W.; Abbott, Derek; Hariz, Alex; Varadan, Vijay K.
Document Type
Proceedings Paper
Year published
2001
Published
in Electronics and Structures for MEMS II
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