Effect of Argon Ion Energy on the Performance of Silicon Nitride Multilayer Permeation Barriers Grown by Hot-Wire Cvd on Polymers

AuthID
 P-00J-Y7R
7
Author(s)
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2015
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 595, Pages: 258-265 (8)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84951777814
Wos: WOS:000365812900010
Source Identifiers
ISSN: 0040-6090
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service