Structural Characterization of Dual Ion Implantation in Silicon

AuthID
 P-00J-Z7T
5
Author(s)
Document Type
Article
Year published
2015
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 365, Pages: 39-43 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-84948576132
Wos: WOS:000366786900010
Source Identifiers
ISSN: 0168-583X
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