On the Possibility of Using the Nanosize Effect of Ion Sputtering in the Development of a High-Current Source of Atomic and Cluster Ions of Solid-State Elements

AuthID
 P-00K-15H
3
Author(s)
Belykh, SF
·
Lozovan, AA
Document Type
Article
Year published
2015
Published
in JOURNAL OF SURFACE INVESTIGATION, ISSN: 1027-4510
Volume: 9, Issue: 6, Pages: 1144-1151 (8)
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84948980109
Wos: WOS:000213962000005
Source Identifiers
ISSN: 1027-4510
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