Quantitative Depth Profiling of Si1-Xgex Structures by Time-Of-Flight Secondary Ion Mass Spectrometry and Secondary Neutral Mass Spectrometry

AuthID
 P-00K-CN8
11
Author(s)
Drozdov, MN
·
Drozdov, YN
·
Csik, A
·
Novikov, AV
·
Vad, K
·
Yunin, PA
·
Belykh, SF
·
Suvorov, DV
·
Document Type
Article
Year published
2016
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 607, Pages: 25-31 (7)
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-84962815194
Wos: WOS:000375130800004
Source Identifiers
ISSN: 0040-6090
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