Electron Interactions with the Focused Electron Beam Induced Processing (Febid) Precursor Tungsten Hexachloride

AuthID
 P-00K-DJS
3
Author(s)
Neustetter, M
·
Document Type
Article
Year published
2016
Published
in RAPID COMMUNICATIONS IN MASS SPECTROMETRY, ISSN: 0951-4198
Volume: 30, Issue: 9, Pages: 1139-1144 (6)
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-84964033498
Wos: WOS:000373947700006
Source Identifiers
ISSN: 0951-4198
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