Radial Profile of the Electron Energy Distribution Function in Rf Capacitive Gas-Discharge Plasma

AuthID
 P-00K-EB8
8
Author(s)
Dimitrova, M
·
Popov, T
·
Puac, N
·
Skoro, N
·
Spasic, K
·
Malovic, G
·
Petrovic, ZL
1
Editor(s)
Ghelev C.van de Sanden M.C.M.Dimitrova M.
Document Type
Proceedings Paper
Year published
2016
Published
in Journal of Physics: Conference Series, ISSN: 1742-6588
Volume: 700, Issue: 1, Pages: 012007
Conference
19Th International Summer School on Vacuum, Electron and Ion Technologies, Veit 2015, Date: 21 September 2015 through 25 September 2015, Sponsors: Dutch Institute for Fundamental Energy Research;IUVSTA;Ministry of Education and Science of Republic of Bulgaria
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Publication Identifiers
SCOPUS: 2-s2.0-84964808991
Source Identifiers
ISSN: 1742-6588
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