Translation-Invariant Multiscale Energy-Based Pca for Monitoring Batch Processes in Semiconductor Manufacturing

AuthID
 P-00M-QQA
4
Author(s)
Rato, TJ
·
Blue, J
·
Pinaton, J
·
Document Type
Article
Year published
2017
Published
in IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, ISSN: 1545-5955
Volume: 14, Issue: 2, Pages: 894-904 (11)
Indexing
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Scopus®
Crossref®46
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84964585423
Wos: WOS:000399347500043
Source Identifiers
ISSN: 1545-5955
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