The Influence of the Ar/O-2 Ratio on the Electron Density and Electron Temperature in Microwave Discharges

AuthID
 P-00N-2TK
4
Author(s)
Espinho, S
·
Hofmann, S
·
Palomares, JM
·
Document Type
Article
Year published
2017
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 26, Issue: 10
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Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85032200805
Wos: WOS:000412274600003
Source Identifiers
ISSN: 0963-0252
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