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Generic Distortion Model for Metrology Under Optical Microscopes
AuthID
P-00N-GDX
6
Author(s)
Liu, XJ
·
Li, ZW
·
Zhong, K
·
Chao, YJ
·
Miraldo, P
·
Shi, YS
Document Type
Article
Year published
2018
Published
in
OPTICS AND LASERS IN ENGINEERING,
ISSN: 0143-8166
Volume: 103, Pages: 119-126 (8)
Indexing
Wos
®
Scopus
®
Crossref
®
13
Google Scholar
®
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Publication Identifiers
DOI
:
10.1016/j.optlaseng.2017.12.006
SCOPUS
: 2-s2.0-85038023354
Wos
: WOS:000423895500014
Source Identifiers
ISSN
: 0143-8166
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