Multilevel Process on Large Area Wafers for Nanoscale Devices

AuthID
 P-00N-MXR
7
Author(s)
Pires, BJ
·
Silva, AV
·
Moskaltsova, A
·
Deepak, FL
·
Document Type
Article
Year published
2018
Published
in JOURNAL OF MANUFACTURING PROCESSES, ISSN: 1526-6125
Volume: 32, Pages: 222-229 (8)
Indexing
Wos®
Scopus®
Crossref®5
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85042460898
Wos: WOS:000435057100022
Source Identifiers
ISSN: 1526-6125
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