20Th International Microprocesses and Nanotechnology Conference, Date: NOV 05-08, 2007, Location: Kyoto, JAPAN, Sponsors: Japan Soc Appl Phys, IEEE Electron Devices Soc, Assoc Super Adv Elect Technol, Inst Elect, Informat & Commun Engineers Japan, Japan Soc Precis Engn, Japanese Soc Synchrotron Radiat Res, Japanese Soc Microscopy, Surface Sci Soc Japan, Vacuum Soc Japan