Non-Aqueous Atomic Layer Deposition of Sno2 for Gas Sensing Application

AuthID
 P-00Q-06P
6
Author(s)
Donato, N
·
Neri, G
1
Editor(s)
De Gendt S.Elam J.W.Dendooven J.Van Der Straten O.Roozeboom F.Liu C.Illiberi A.
Document Type
Proceedings Paper
Year published
2018
Published
in ECS Transactions, ISSN: 1938-6737
Volume: 86, Issue: 6, Pages: 55-65
Conference
Symposium on Atomic Layer Deposition Applications 14 - Aimes 2018, Ecs and Smeq Joint International Meeting, Date: 30 September 2018 through 4 October 2018, Sponsors: Dielectric Science and Technology;Electronics and Protonics
Indexing
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Publication Identifiers
Scopus: 2-s2.0-85058303921
Source Identifiers
ISSN: 1938-6737
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