Development of a Gas Cluster Ion Source and Its Application for Surface Treatment

AuthID
 P-00Q-MMV
7
Author(s)
Pelenovich, VO
·
Zeng, XM
·
Ieshkin, AE
·
Chernysh, VS
·
Yang, B
·
Fu, DJ
Document Type
Article
Year published
2019
Published
in JOURNAL OF SURFACE INVESTIGATION, ISSN: 1027-4510
Volume: 13, Issue: 2, Pages: 344-350 (7)
Indexing
Wos®
Scopus®
Crossref®8
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85066152748
Wos: WOS:000468811200033
Source Identifiers
ISSN: 1027-4510
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

footer slogan

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service