Small Al Cluster Ion Implantation into Si and 4H-Sic

AuthID
 P-00Q-YDT
11
Author(s)
Zeng, XM
·
Pelenovich, V
·
Ieshkin, A
·
Danilov, A
·
Zuo, WB
·
Ranjana, J
·
Hu, DH
·
Devi, N
·
Fu, DJ
·
Xiao, XH
Document Type
Article
Year published
2019
Published
in RAPID COMMUNICATIONS IN MASS SPECTROMETRY, ISSN: 0951-4198
Volume: 33, Issue: 18, Pages: 1449-1454 (6)
Indexing
Wos®
Scopus®
Crossref®5
Pubmed®
Google Scholar®
Publication Identifiers
Pubmed: 31128075
Scopus: 2-s2.0-85070483335
Wos: WOS:000480285100004
Source Identifiers
ISSN: 0951-4198
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