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Substrate Temperature Influenced Zro2 Films for Mos Devices
AuthID
P-00R-XWX
7
Author(s)
Kondaiah, P
·
Chandra, SVJ
·
Fortunato, E
·
Jong, CC
·
Rao, GM
·
Reddy, VRK
·
Uthanna, S
Document Type
Article
Year published
2020
Published
in
SURFACE AND INTERFACE ANALYSIS,
ISSN: 0142-2421
Volume: 52, Issue: 9, Pages: 541-546 (6)
Indexing
Wos
®
Scopus
®
Crossref
®
11
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®
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Publication Identifiers
DOI
:
10.1002/sia.6775
SCOPUS
: 2-s2.0-85082405882
Wos
: WOS:000521817400001
Source Identifiers
ISSN
: 0142-2421
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