Publications

AuthID
P-00R-Z4G

Author(s)

Naffati, N

Nsib, MF

Arfaoui, Y

Houas, A

Document Type

Article

Year published

2020

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 115, Pages: 105098 (7)

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Publication Identifiers

DOI: 10.1016/j.mssp.2020.105098

Scopus: 2-s2.0-85082822254

Wos: WOS:000535469600005

Source Identifiers

ISSN: 1369-8001

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