An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

AuthID
 P-00S-9K7
6
Author(s)
Gama, GRD
·
Coelho, CAA
·
Gaspar, J
·
Sommer, RL
·
Mello, A
Document Type
Article
Year published
2020
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 29, Issue: 3, Pages: 387-396 (10)
Indexing
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Scopus®
Crossref®8
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Publication Identifiers
SCOPUS: 2-s2.0-85086144231
Wos: WOS:000543148100013
Source Identifiers
ISSN: 1057-7157
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