Ultra-Short Pulse Hipims: A Strategy to Suppress Arcing During Reactive Deposition of Sio(2)Thin Films with Enhanced Mechanical and Optical Properties

AuthID
P-00S-FZD
6
Author(s)
Tiron, V
·
Velicu, IL
·
Matei, T
·
Cristea, D
·
Stoian, G
Document Type
Article
Year published
2020
Published
in COATINGS, ISSN: 2079-6412
Volume: 10, Issue: 7, Pages: 633 (11)
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Publication Identifiers
Scopus: 2-s2.0-85088233629
Wos: WOS:000554213600001
Source Identifiers
ISSN: 2079-6412
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