The Effect of Film Thickness on the Dissolution Rate and Hydrogen Bonding Behavior of Photoresist Polymer Thin Films

AuthID
 P-00S-HMT
3
Author(s)
Ludovice, PJ
·
Henderson, CL
1
Editor(s)
John L.Sturtevant
Document Type
Proceedings Paper
Year published
2005
Published
in Advances in Resist Technology and Processing XXII
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