N-2-H(2)Capacitively Coupled Radio-Frequency Discharges at Low Pressure: Ii. Modeling Results: the Relevance of Plasma-Surface Interaction

AuthID
 P-00S-REW
7
Author(s)
Jimenez Redondo, M
·
Chatain, A
·
Guaitella, O
·
Cernogora, G
·
Carrasco, N
·
Marques, L
Document Type
Article
Year published
2020
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 29, Issue: 8, Pages: 085023 (23)
Indexing
Wos®
Scopus®
Crossref®12
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85091159009
Wos: WOS:000568417900001
Source Identifiers
ISSN: 0963-0252
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