in 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999
Pages: 873-876 (4)
Conference
33Rd Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 18-22, 2020, Location: Vancouver, CANADA, Sponsors: IEEE, IEEE MEMS Tech Community