Dependence of Optical Properties on Composition of Silicon Carbonitride Thin Films Deposited at Low Temperature by Pecvd

AuthID
 P-00S-VJ1
7
Author(s)
de Carvalho, CN
·
Document Type
Article
Year published
2021
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 551, Pages: 120434 (6)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85092396548
Wos: WOS:000589928100002
Source Identifiers
ISSN: 0022-3093
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