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Structural and Mechanical Analysis of Apcvd Deposited Diamond-Like Carbon Thin Films
AuthID
P-00S-XCG
5
Author(s)
Ghadai, RK
·
Das, S
·
Kalita, K
·
Swain, BP
·
Davim, JP
Document Type
Article in Press
Year published
2020
Published
in
SILICON,
ISSN: 1876-990X
Volume: 13, Issue: 12, Pages: 4453-4462 (10)
Indexing
Wos
®
Scopus
®
Crossref
®
14
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®
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Publication Identifiers
DOI
:
10.1007/s12633-020-00760-3
SCOPUS
: 2-s2.0-85092737955
Wos
: WOS:000578989400003
Source Identifiers
ISSN
: 1876-990X
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