in 2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999
Volume: 2021-January, Pages: 795-798 (4)
Conference
34Th Ieee International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 25-29, 2021, Location: ELECTR NETWORK, Sponsors: IEEE, IEEE MEMS Tech Community