Publications

AuthID
P-00V-J3M

Author(s)

Gunasekaran, S

Marnadu, R

Thangaraju, D

Chandrasekaran, J

Hegazy, HH

Somaily, HH

Durairajan, A

Elango, M

Reddy, VRM

Document Type

Article

Year published

2021

Published

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 135, Pages: 106097 (13)

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Publication Identifiers

DOI: 10.1016/j.mssp.2021.106097

Wos: WOS:000704361400007

Source Identifiers

ISSN: 1369-8001

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