Role of the Metal Supply Pathway on Silicon Patterning by Oblique Ion Beam Sputtering

AuthID
 P-00V-XGB
9
Author(s)
Redondo Cubero, A
·
Palomares, FJ
·
Rubio Zuazo, J
·
Hubner, R
·
Mompean, FJ
·
Garcia Hernandez, M
·
Castro, GR
·
Vazquez, L
Document Type
Article
Year published
2022
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 580, Pages: 152267 (13)
Indexing
Wos®
Scopus®
Crossref®6
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85121609927
Wos: WOS:000784350400003
Source Identifiers
ISSN: 0169-4332
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