Hipims Pulse Shape Influence on the Deposition of Diamond-Like Carbon Films

AuthID
P-00W-FD6
4
Author(s)
Document Type
Article
Year published
2022
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 432, Pages: 128059 (10)
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Publication Identifiers
SCOPUS: 2-s2.0-85122329443
Wos: WOS:000782669800004
Source Identifiers
ISSN: 0257-8972
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