Cmos-Integrated Aluminum Nitride Mems: A Review

AuthID
 P-00W-QJR
5
Author(s)
Gund, V
·
Dias, RA
·
Nagaraja, KK
·
Vinayakumar, KB
Document Type
Review
Year published
2022
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Indexing
Wos®
Google Scholar®
Publication Identifiers
Wos: WOS:000799584900001
Source Identifiers
ISSN: 1057-7157
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service