Effect of Substrate Bias Voltage on Structural and Tribological Properties of W-Ti-C-N Thin Films Produced by Combinational Hipims and Dcms Co-Sputtering

AuthID
 P-00X-ZFV
7
Author(s)
Ataie, SA
·
Soltanieh, M
·
Naghizadeh, R
·
Fernandes, F
·
Ferreira, F
Document Type
Article
Year published
2023
Published
in WEAR, ISSN: 0043-1648
Volume: 520, Pages: 204654 (17)
Indexing
Wos®
Scopus®
Crossref®2
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85148700961
Wos: WOS:000963847400001
Source Identifiers
ISSN: 0043-1648
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