Sputtering of Coinage Metals with Bismuth Cluster Ions: Experiment and Computer Simulation

AuthID
P-00Y-7PQ
4
Author(s)
Ieshkin, AE
·
Gainullin, IK
·
Mazarov, P
Document Type
Article
Year published
2023
Published
in VACUUM, ISSN: 0042-207X
Volume: 213, Pages: 112070 (6)
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Publication Identifiers
Scopus: 2-s2.0-85151788497
Wos: WOS:000981659200001
Source Identifiers
ISSN: 0042-207X
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