Electrical Properties and Thermistor Behavior of Tialn Thin Films Deposited by Combinatorial Sputtering

AuthID
P-00Y-BD6
6
Author(s)
Martins, B
·
Patacas, C
·
Bondarchuk, O
·
Fernandes, F
Document Type
Article
Year published
2023
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 464, Pages: 129545 (9)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-85154586113
Wos: WOS:000999845700001
Source Identifiers
ISSN: 0257-8972
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