Publications

AuthID
P-00Y-QR6

Author(s)

Caçador, A

Jóźwik, P

Magalhães, S

Wendler, E

Document Type

Article

Year published

2023

Published

in Materials Science in Semiconductor Processing, ISSN: 1369-8001

Volume: 166, Pages: 107702

Indexing

Scopus^®

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Google Scholar^®

Publication Identifiers

DOI: 10.1016/j.mssp.2023.107702

SCOPUS: 2-s2.0-85164220678

Source Identifiers

ISSN: 1369-8001

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